Set of primary microbeam masks for the X-ray focusing mirrors (Co and Cu) and the X-ray parallel beam mirrors (Co and Cu). It contains three masks of different widths, 0.2 mm, 0.3 mm and 0.5 mm. The primary masks are inserted in the X-ray mirror, close to the X-ray focus. They can be used in combination with either the 9430 061 21001 Microbeam collimators or with the 9430 061 20011 secondary microbeam masks in order to create an intense microbeam with small divergence on the sample.