Set of microbeam collimators for X-ray focusing and parallel beam mirrors (Co and Cu). Three microbeam collimators are included with different openings, 0..1 mm, 0.3 mm and 0.5 mm. Combination of one microbeam collimator with one of the microbeam primary masks (9430 061 20001) inserted in the X-ray mirror create an intense microbeam with small divergence on the sample.